FN Archimer Export Format
PT J
TI Selenide sputtered films development for MIR environmental sensor
BT 
AF BAUDET, Emeline
   GUTIERREZ-ARROYO, A.
   NEMEC, P.
   BODIOU, L.
   LEMAITRE, J.
   DE SAGAZAN, O.
   LHERMITTE, H.
   RINNERT, Emmanuel
   MICHEL, K.
   BUREAU, B.
   CHARRIER, J.
   NAZABAL, V.
AS 1:1;2:2;3:3;4:2;5:2;6:4;7:4;8:5;9:6;10:1;11:2;12:1;
FF 1:;2:;3:;4:;5:;6:;7:;8:PDG-REM-RDT-LDCM;9:;10:;11:;12:;
C1 Univ Rennes 1, Equipe Verres & Ceram, UMR CNRS 6226, Inst Sci Chim Rennes, F-35042 Rennes, France.
   FOTON UMR CNRS 6082, ENSSAT BP80518, F-22305 Lannion, France.
   Univ Pardubice, Fac Chem Technol, Dept Graph Arts & Photophys, Studentska 573, Pardubice 53210, Czech Republic.
   Univ Rennes 1, IETR, F-35042 Rennes, France.
   IFREMER, Lab Detect Capteurs & Mesures, Dept Rech & Dev Technol, F-29280 Plouzane, France.
   Bur Rech Geol & Minieres, Direct Eau Environm & Ecotechnol, Unite Biogeochim Environm & Qualite Eau, F-45060 Orleans, France.
C2 UNIV RENNES, FRANCE
   ENSSAT, FRANCE
   UNIV PARDUBICE, CZECH REPUBLIC
   UNIV RENNES, FRANCE
   IFREMER, FRANCE
   BRGM, FRANCE
SI BREST
SE PDG-REM-RDT-LDCM
IN WOS Ifremer jusqu'en 2018
   DOAJ
   copubli-france
   copubli-p187
   copubli-europe
   copubli-univ-france
IF 2.591
TC 30
UR https://archimer.ifremer.fr/doc/00346/45709/45337.pdf
LA English
DT Article
AB A micro-sensor based on selenide glasses for evanescent wave detection in mid-infrared spectral range was designed and fabricated. Ge-Sb-Se thin films were successfully deposited by radio-frequency magnetron sputtering. In order to characterize them spectroscopic ellipsometry, atomic force microscopy and contact angle measurements were employed to study near and middle infrared refractive index, surface roughness and the wettability, respectively. Selenide sputtered films were micro-patterned by means of reactive ion etching with inductively coupled plasma process enabling single-mode propagation at a wavelength of 7.7 µm for a waveguide width between 8 and 12 µm. Finally, optical waveguide surface was functionalized by deposition of a hydrophobic polymer, which will permit detection of organic molecules in water. Thus, the optical transducer is a ridge waveguide composed by cladding and guiding Ge-Sb-Se sputtered layers exhibiting a tailored refractive index contrast and a polymer layer onto its surface ready for environmental detections in middle infrared.
PY 2016
PD AUG
SO Optical Materials Express
SN 2159-3930
PU Optical Soc Amer
VL 6
IS 8
UT 000382006900017
BP 2616
EP 2627
DI 10.1364/OME.6.002616
ID 45709
ER

EF