FN Archimer Export Format PT J TI Development of an evanescent optical integrated sensor in the mid-infrared for detection of pollution in groundwater or seawater BT AF Baudet, Emeline Gutierrez-Arroyo, A. Baillieul, Marion Charrier, J. Němec, P. Bodiou, L. Lemaitre, J. Rinnert, Emmanuel Michel, K. Bureau, B. Adam, J. L. Nazabal, V. AS 1:1;2:2;3:1;4:2;5:3;6:2;7:2;8:4;9:5;10:1;11:1;12:1; FF 1:PDG-REM-RDT-LDCM;2:;3:PDG-REM-RDT-LDCM;4:;5:;6:;7:;8:PDG-REM-RDT-LDCM;9:;10:;11:;12:; C1 Institut des Sciences Chimiques de Rennes, UMR-CNRS 6226, Equipe Verres et Céramiques, Université de Rennes 1, Rennes, France FOTON -UMR-CNRS 6082, ENSSAT, Lannion Cedex, France Faculty of Chemical Technology, Department of Graphic Arts and Photophysics, University of Pardubice, Pardubice, Czech Republic Laboratoire Détection, Capteurs et Mesures, Dpt. Recherches et Développements Technologiques, IFREMER, Plouzané, France BRGM, Direction Eau, Environnement et Ecotechnologies, Unité Bio-Géochimie environnementale et qualité de l’Eau, Orléans, France C2 UNIV RENNES, FRANCE ENSSAT, FRANCE UNIV PARDUBICE, CZECH REPUBLIC IFREMER, FRANCE BRGM, FRANCE SI BREST SE PDG-REM-RDT-LDCM TC 0 UR https://archimer.ifremer.fr/doc/00389/50014/50603.pdf LA English DT Article DE ;Optical sensing and sensors;mid-infrared;integrated optics devices;Chalcogenide glasses;thin films AB The detection of molecules dissolved in liquid medium can be envisaged by means of an optical integrated sensor operating in middle infrared range. The intended sensor is composed of a cladding and a guiding selenide sputtered layers transparent in middle infrared. Hence, Ge-Sb-Se thin films were selected in view of tailored refractive index contrast, successfully deposited by radio frequency magnetron sputtering and characterized. To maximize the evanescent field at a wavelength of 7.7 µm, a suitable selenide waveguide allowing measuring the optical transmitted power was designed by performing computer simulations based on the effective index method enabling single-mode propagation for a waveguide width between 8 and 12 µm. Selenide sputtered films were micro-patterned using reactive ion etching with inductively coupled plasma process. Finally, optical waveguide surface was functionalized by the deposition of a hydrophobic polymer, which will permit detection of organic molecules in water. PY 2017 PD JUL SO Advanced Device Materials SN 2055-0308 PU Informa UK Limited VL 3 IS 2 BP 23 EP 29 DI 10.1080/20550308.2017.1338211 ID 50014 ER EF