FN Archimer Export Format
PT J
TI Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors
BT 
AF BAUDET, Emeline
   SERGENT, M.
   NEMEC, P.
   CARDINAUD, C.
   RINNERT, Emmanuel
   MICHEL, K.
   JOUANY, L.
   BUREAU, B.
   NAZABAL, V.
AS 1:1;2:2;3:3;4:4;5:5;6:6;7:1;8:1;9:1,3;
FF 1:;2:;3:;4:;5:PDG-REM-RDT-LDCM;6:;7:;8:;9:;
C1 Univ Rennes 1, UMR CNRS 6226, Inst Sci Chim Rennes, F-35042 Rennes, France.
   Aix Marseille Univ, LISA EA4672, Campus Sci St Jerome, F-13397 Marseille, France.
   Univ Pardubice, Fac Chem Technol, Dept Graph Arts & Photophys, Studentska 573, Pardubice 53210, Czech Republic.
   Univ Nantes, CNRS, Inst Mat Jean Rouxel IMN UMR 6502, F-44322 Nantes 3, France.
   IFREMER, Lab Detect Capteurs & Mesures, Dept Rech & Dev Technol, F-29280 Plouzane, France.
   Bur Rech Geol & Minieres, Direct Eau Environm & Ecotechnol, Unite Biogeochim Environm & Qualite Eau, F-45060 Orleans, France.
C2 UNIV RENNES, FRANCE
   UNIV AIX MARSEILLE, FRANCE
   UNIV PARDUBICE, CZECH REPUBLIC
   UNIV NANTES, FRANCE
   IFREMER, FRANCE
   BRGM, FRANCE
SI BREST
SE PDG-REM-RDT-LDCM
IN WOS Ifremer jusqu'en 2018
   DOAJ
   copubli-france
   copubli-p187
   copubli-europe
   copubli-univ-france
IF 4.122
TC 35
UR https://archimer.ifremer.fr/doc/00390/50119/50725.pdf
LA English
DT Article
AB The development of the optical bio-chemical sensing technology is an extremely important scientific and technological issue for diagnosis and monitoring of diseases, control of industrial processes, environmental detection of air and water pollutants. Owing to their distinctive features, chalcogenide amorphous thin films represent a keystone in the manufacture of middle infrared integrated optical devices for a sensitive detection of biological or environmental variations. Since the chalcogenide thin films characteristics, i. e. stoichiometric conformity, structure, roughness or optical properties can be affected by the growth process, the choice and control of the deposition method is crucial. An approach based on the experimental design is undoubtedly a way to be explored allowing fast optimization of chalcogenide film deposition by means of radio frequency sputtering process. Argon (Ar) pressure, working power and deposition time were selected as potentially the most influential factors among all possible. The experimental design analysis confirms the great influence of the Ar pressure on studied responses: chemical composition, refractive index in near-IR (1.55 mu m) and middle infrared (6.3 and 7.7 mu m), band-gap energy, deposition rate and surface roughness. Depending on the intended application and therefore desired thin film characteristics, mappings of the experimental design meaningfully help to select suitable deposition parameters. 
PY 2017
PD JUL
SO Scientific Reports
SN 2045-2322
PU Nature Publishing Group
VL 7
IS 3500
UT 000403318400054
BP 1
EP 14
DI 10.1038/s41598-017-03678-w
ID 50119
ER

EF