FN Archimer Export Format
PT J
TI Downsizing and Silicon Integration of Photoacoustic Gas Cells
BT 
AF GLIERE, Alain
   BARRITAULT, Pierre
   BERTHELOT, Audrey
   CONSTANCIAS, Christophe
   COUTARD, Jean-Guillaume
   DESLOSGES, Brigitte
   DURRAFOURG, Laurent
   FEDELI, Jean-MARC
   GARCIA, Marine
   LARTIGUE, Olivier
   LHERMET, Hélène
   MARCHANT, Adrien
   ROUXEL, Justin
   SKUBICH, Jules
   TEULLE, Alexandre
   VERDOT, Thierry
   NICOLETTI, Sergio
AS 1:1;2:1;3:1;4:1;5:1;6:1;7:1;8:1;9:1;10:1;11:1;12:1;13:1;14:1;15:1;16:1;17:1;
FF 1:;2:;3:;4:;5:;6:;7:;8:;9:;10:;11:;12:;13:;14:;15:;16:;17:;
C1 CEA, LETI, Univ. Grenoble Alpes, F-38000 Grenoble, France
C2 CEA, FRANCE
IF 0.569
TC 7
UR https://archimer.ifremer.fr/doc/00600/71210/69571.pdf
LA English
DT Article
DE ;MEMS;Photoacoustic spectroscopy;Silicon integration;Trace gas measurements
AB Downsizing and compatibility with MEMS silicon foundries is an attractive path towards a large diffusion of photoacoustic trace gas sensors. As the photoacoustic signal scales inversely with the chamber volume, a trend to miniaturization has been followed by several teams. We review in this article the approach initiated several years ago in our laboratory. Three generations of components, namely a 40 mm3 3D-printed cell, a 3.7 mm3 silicon cell, and a 2.3 mm3 silicon cell with a built-in piezoresistive pressure sensor, have been designed. The models used take into account the viscous and thermal losses, which cannot be neglected for such small-sized resonators. The components have been fabricated either by additive manufacturing or microfabrication and characterized. Based on a compilation of experimental data, a similar sub-ppm limit of detection is demonstrated. All three versions of photoacoustic cells have their own domain of operation as each one has benefits and drawbacks, regarding fabrication, implementation, and ease of use. 
PY 2020
PD JAN
SO International Journal Of Thermophysics
SN 0195-928X
PU Springer
VL 41
IS 2
UT 000514586900004
DI 10.1007/s10765-019-2580-7
ID 71210
ER

EF