Selenide sputtered films development for MIR environmental sensor

Type Article
Date 2016-08
Language English
Author(s) Baudet Emeline1, Gutierrez-Arroyo A.2, Nemec P.3, Bodiou L.2, Lemaitre J.2, de Sagazan O.4, Lhermitte H.4, Rinnert EmmanuelORCID5, Michel K.6, Bureau B.1, Charrier J.2, Nazabal V.1
Affiliation(s) 1 : Univ Rennes 1, Equipe Verres & Ceram, UMR CNRS 6226, Inst Sci Chim Rennes, F-35042 Rennes, France.
2 : FOTON UMR CNRS 6082, ENSSAT BP80518, F-22305 Lannion, France.
3 : Univ Pardubice, Fac Chem Technol, Dept Graph Arts & Photophys, Studentska 573, Pardubice 53210, Czech Republic.
4 : Univ Rennes 1, IETR, F-35042 Rennes, France.
5 : IFREMER, Lab Detect Capteurs & Mesures, Dept Rech & Dev Technol, F-29280 Plouzane, France.
6 : Bur Rech Geol & Minieres, Direct Eau Environm & Ecotechnol, Unite Biogeochim Environm & Qualite Eau, F-45060 Orleans, France.
Source Optical Materials Express (2159-3930) (Optical Soc Amer), 2016-08 , Vol. 6 , N. 8 , P. 2616-2627
DOI 10.1364/OME.6.002616
WOS© Times Cited 29
Abstract A micro-sensor based on selenide glasses for evanescent wave detection in mid-infrared spectral range was designed and fabricated. Ge-Sb-Se thin films were successfully deposited by radio-frequency magnetron sputtering. In order to characterize them spectroscopic ellipsometry, atomic force microscopy and contact angle measurements were employed to study near and middle infrared refractive index, surface roughness and the wettability, respectively. Selenide sputtered films were micro-patterned by means of reactive ion etching with inductively coupled plasma process enabling single-mode propagation at a wavelength of 7.7 µm for a waveguide width between 8 and 12 µm. Finally, optical waveguide surface was functionalized by deposition of a hydrophobic polymer, which will permit detection of organic molecules in water. Thus, the optical transducer is a ridge waveguide composed by cladding and guiding Ge-Sb-Se sputtered layers exhibiting a tailored refractive index contrast and a polymer layer onto its surface ready for environmental detections in middle infrared.
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Baudet Emeline, Gutierrez-Arroyo A., Nemec P., Bodiou L., Lemaitre J., de Sagazan O., Lhermitte H., Rinnert Emmanuel, Michel K., Bureau B., Charrier J., Nazabal V. (2016). Selenide sputtered films development for MIR environmental sensor. Optical Materials Express, 6(8), 2616-2627. Publisher's official version : , Open Access version :