Volume detection based on porous silicon waveguide for CO2 mid-infrared spectroscopy
Type | Article | ||||||||
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Date | 2024-04-08 | ||||||||
Language | English | ||||||||
Author(s) | Meziani Sofiane1, Jaafar Abdallah1, Hammouti Abdelali1, Bodiou Loïc1, Lorrain Nathalie1, Pirasteh Parastesh1, Courson Remi2, Lemaitre Jonathan1, Nazabal Virginie3, Guendouz Mohammed1, Charrier Joël1 | ||||||||
Affiliation(s) | 1 : Univ Rennes, CNRS, Institut Foton-UMR 6082, 22305 Lannion, France 2 : Ifremer, RDT Research and Technological Development, F-29280 Plouzané, France 3 : CNRS UMR 6226 ISCR, Université de Rennes, 22302 Rennes, France |
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Source | Optics Express (1094-4087) (Optica Publishing Group), 2024-04-08 , Vol. 32 , N. 8 , P. 13628-13639 | ||||||||
DOI | 10.1364/OE.516923 | ||||||||
Abstract | A mid-infrared (mid-IR) porous silicon (PSi) waveguide gas sensor was fabricated. PSi guiding and confinement layers were prepared by electrochemical anodization. Ridge waveguides were patterned using standard i-line photolithography and reactive ion etching. Due to the open pores, light and gas molecules interact in the inside volume, unlike bulk material in which the interaction takes place with the evanescent part of the light. Propagation losses are measured for a wavelength range spanning from λ = 3.9 to 4.55 µm with a value of 11.4 dB/cm at λ = 4.28 µm. The influence of native oxidation and ageing on the propagation losses was investigated. Limit of detection (LoD) of 1000 ppm is obtained with the waveguide sensor at the carbon dioxide (CO2) absorption peak at λ = 4.28 µm. |
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