Mid-infrared integrated spectroscopic sensor based on chalcogenide glasses: optical characterization and sensing applications

A mid-infrared (mid-IR) spectroscopic sensor is developed using a chalcogenide glasses (ChGs) platform with a broad transmission band. The ridge ChGs waveguides were patterned via standard i-line photolithography and reactive ion etching, following the deposition of guiding and confinement layers through RF magnetron sputtering. The waveguides exhibit a wide transparency range from λ = 3.94 to 8.95 μm, with minimum propagation losses value of 2.5 dB/cm at λ = 7.58 μm. To validate the feasibility of the suggested sensor, a spectroscopic gas sensing experiment was performed using CO2, resulting in an estimated limit of detection (LoD) of 1.16%v at λ = 4.28 μm, achieved with an external confinement factor Γ of 6.5%. Additionally, liquid sensing experiment was carried out using isopropanol, obtaining a LoD of 300 ppmv at λ = 7.25 μm.

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Meziani S., Hammouti A., Bodiou L., Lorrain N., Chahal R., Bénardais A., Courson Remi, Troles J., Boussard-Pledel C., Nazabal V., Charrier J. (2025). Mid-infrared integrated spectroscopic sensor based on chalcogenide glasses: optical characterization and sensing applications. Advanced Sensor and Energy Materials. INPRESS. https://doi.org/10.1016/j.asems.2025.100149, https://archimer.ifremer.fr/doc/00944/105566/

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