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Mid-infrared integrated spectroscopic sensor based on chalcogenide glasses: optical characterization and sensing applications
A mid-infrared (mid-IR) spectroscopic sensor is developed using a chalcogenide glasses (ChGs) platform with a broad transmission band. The ridge ChGs waveguides were patterned via standard i-line photolithography and reactive ion etching, following the deposition of guiding and confinement layers through RF magnetron sputtering. The waveguides exhibit a wide transparency range from λ = 3.94 to 8.95 μm, with minimum propagation losses value of 2.5 dB/cm at λ = 7.58 μm. To validate the feasibility of the suggested sensor, a spectroscopic gas sensing experiment was performed using CO2, resulting in an estimated limit of detection (LoD) of 1.16%v at λ = 4.28 μm, achieved with an external confinement factor Γ of 6.5%. Additionally, liquid sensing experiment was carried out using isopropanol, obtaining a LoD of 300 ppmv at λ = 7.25 μm.
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File | Pages | Size | Access | |
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Author's final draft IN PRESS | 22 | 1 Mo |